JPS6035210U - タッチセンサー - Google Patents

タッチセンサー

Info

Publication number
JPS6035210U
JPS6035210U JP12774283U JP12774283U JPS6035210U JP S6035210 U JPS6035210 U JP S6035210U JP 12774283 U JP12774283 U JP 12774283U JP 12774283 U JP12774283 U JP 12774283U JP S6035210 U JPS6035210 U JP S6035210U
Authority
JP
Japan
Prior art keywords
movable body
reference surface
contact
force
fixed housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12774283U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0239206Y2 (en]
Inventor
古賀　和典
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP12774283U priority Critical patent/JPS6035210U/ja
Publication of JPS6035210U publication Critical patent/JPS6035210U/ja
Application granted granted Critical
Publication of JPH0239206Y2 publication Critical patent/JPH0239206Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP12774283U 1983-08-18 1983-08-18 タッチセンサー Granted JPS6035210U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12774283U JPS6035210U (ja) 1983-08-18 1983-08-18 タッチセンサー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12774283U JPS6035210U (ja) 1983-08-18 1983-08-18 タッチセンサー

Publications (2)

Publication Number Publication Date
JPS6035210U true JPS6035210U (ja) 1985-03-11
JPH0239206Y2 JPH0239206Y2 (en]) 1990-10-22

Family

ID=30290026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12774283U Granted JPS6035210U (ja) 1983-08-18 1983-08-18 タッチセンサー

Country Status (1)

Country Link
JP (1) JPS6035210U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254114A (ja) * 1985-09-03 1987-03-09 Nippon Kogaku Kk <Nikon> 三次元座標測定機
JP2007139769A (ja) * 2005-11-14 2007-06-07 Immobilien Ges Helmut Fischer Gmbh & Co Kg 特に、薄層の厚さ測定装置用の測定プローブ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6254114A (ja) * 1985-09-03 1987-03-09 Nippon Kogaku Kk <Nikon> 三次元座標測定機
JP2007139769A (ja) * 2005-11-14 2007-06-07 Immobilien Ges Helmut Fischer Gmbh & Co Kg 特に、薄層の厚さ測定装置用の測定プローブ

Also Published As

Publication number Publication date
JPH0239206Y2 (en]) 1990-10-22

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